精品国产91久久久久久_女人天堂A级毛片免费看_深夜释放自己污在线看_性巴克在线免费下载_裸体视频香蕉一区二区_717yy欧美夜夜电影福利_国产精彩刺激真实乱对白在线播放_国产精品盗摄偷窥盗摄观看视频_亚洲免费国产日本_毛片网址免费在线

Inline equipment, which can be integrated with one or two boat-boat interface PECVD equipment and realize the transportation of graphite boat and wafers load & unload automatically. This equipment can be applied in the process before and after PECVD process, which can load the wafers from the cassette to the graphite boat and transport the fulfilled boat to the PECVD equipment or transport the processed boat to this equipment and unload the wafers from the graphite boat to the cassette automatically.

Integrated wafer loading& unloading, unloading the wafers from the quartz boat to the cassette or loading the wafers from the cassette to the quartz boat. Available for double back-to-back wafers in one slot which realize single side diffusion or available for single wafer in a slot for double-side diffusion. With continuous wafer loading&unloading can guarantee the continuous production . Or be used only for wafer loading or unloading is also available.

Replace manual transportation of cassettes,all information can be intelligent interaction and resources are controlled intelligently,which realize automatic production of entire production line and intelligent management of the whole plant.