設備名稱 Equipment name

管式低壓氧化退火設備  Horizontal Low Pressure Oxidation/Annealing Equipment

設備型號 Equipment Model

DOA-420/DOA-420L/DOA-420MAX

設備用途 Equipment Application

低壓氧化、退火。
Low Pressure oxidation, annealing.

技術特點  Features 

1、大產(chǎn)能。

High throughput.

2、配套相關專利技術，可兼容或升級硼擴散工藝。
Patented technology, compatible or upgradeable with boron diffusion process.

3、獨特雙嵌套爐門結構。
Unique double-layer-nested furnace door structure.

4、高速平穩(wěn)整體模組推舟機構。
High-speed and stable integral module boat pushing mechanism.

設備參數(shù)  Parameters